OSC-M200 Series (200×200 or 8inch)

   Vacuum evaporation system

   Making high quality

Component

   Cluster System : LL,TM,BF,UL,PC,MC,PT,GB

   Possible with customer’s desired design

   Quartz Crucible only system

Technology

   Secure vacuum robot transfer system

   Convenient full auto system

   Align accuracy (micro Align)

   Various equipment know-how