OSC-S200 Series (200×200)

   In-line sputtering system

   Inorganic thin film deposition systems optimized for various industries

Component

   Cluster System linkage possible

   Target material, Vacuum chamber

   *Optimized configuration for customer requirements 

Technology

   Ensure uniform deposition

   Plasma pretreatment process

   Ensure thermal stability

   Superior thin film quality and maximization of target efficiency