OSC-D100 Series (100×100)

OSC-D200 Series (200×200)

Vacuum evaporation system

Making high quality

Component

Cluster System : LL,TM,BF,UL,OC,MC,PT,GB

Possible with customer’s desired design

Quartz Crucible only system

Technology

Secure vacuum robot transfer system

Convenient full auto system

Align accuracy

Various equipment know-how