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Revolver Deposition Source (Cell)
작성자 : 권영철(kyc1339@gmail.com) 작성일 : 2023-08-02 조회수 : 25
파일첨부 : Revolver Deposition Source (Cell)1-1.JPG
Features
Revolver Source
120CC Low Temp & High Temp
Revolver Cell (4EA)

Component
Bottom side installation type
single actuation shutter
crucible up/down loading
control system

Technology
After the first material is consumed,
the vacuum Using the loaded crucible while holding
Reload the material to maintain the vacuum for a long time can deposit
이전글 Point Deposition Source (Cell)
다음글